Ultrafast Laser-enabled High-resolution Ultrasonic Characterization of Semiconductor Interior Structures
by Zhongqing Su
The Hong Kong Polytechnic University, Hong Kong, China
Abstract
Path-breaking advances in ultrafast laser technology have shed new light on optical–acoustic coupling and opened up intriguing application prospects. In this talk, we will report on a new nondestructive evaluation framework based on ultrafast laser ultrasonics, from fundamental theory to implementation details. Making use of the ultrashort acoustic wavelength of laser-generated ultrasound, the femtosecond-laser-enabled ultrasonics techniques have enabled super high-resolution material characterization at the nanoscale. The approach has been experimentally demonstrated by characterizing the monocrystalline semiconductor wafers which are of a high degree of anisotropy, and imaging interior features of an opaque, stacked micro-system, three-dimensionally and contactlessly.
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Zhongqing SU |
Biography Zhongqing Su (PhD) is the Chair Professor of Intelligent Structures and Systems and Head of the Department of Mechanical Engineering at The Hong Kong Polytechnic University, Hong Kong. He is the current Editor-in-Chief of the journal Ultrasonics (Elsevier) and holds the Changjiang Chair Professorship. He is also the current President of The Hong Kong Society of Theoretical and Applied Mechanics. His research interests span the area of ultrasonics, structural health monitoring (SHM), wave propagation, smart materials, intelligent systems, and advanced composites. Prof. Su earned his PhD in 2004 from the School of Aerospace, Mechanical and Mechatronic Engineering at The University of Sydney, Australia. Prof. Su was the Chair of a number of key international conferences in his field, including the 7th Asia-Pacific Workshop on SHM (Hong Kong, 2018), the SPIE Conference on Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2023 (Long Beach, the United States, 2023), and the SPIE Conference on Health Monitoring of Structural and Biological Systems XVIII (Long Beach, the United States, 2024; Vancouver, Canada, 2025). He is an elected Distinguished Fellow of the International Institute of Acoustics and Vibration (IIAV). More details about Prof. Zhongqing Su can be found at https://www.polyu.edu.hk/me/people/academic-teaching-staff/su-zhong-qing-prof/ |
